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多晶硅的快速热处理磷吸杂研究，李晓强，杨德仁，本文利用微波光电导衰减仪和光学显微镜对多晶硅的快速热处理（RTP）磷吸杂进行了研究，发现RTP磷吸杂存在一个最佳吸杂温度900℃。另
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