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重掺磷直拉硅单晶的微缺陷，王镇辉，马向阳，本文研究了重掺磷直拉硅单晶中氧沉淀和流动图案两种微缺陷以及它们之间的相互关系.两步法高温热处理用于形成氧沉淀.研究表明体微�
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